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Advanced Lithographic Solutions using Block Copolymers: Integrating Self Assembly and Lithography (2009-2011)

Abstract

The trillion dollar semiconductor industry relies on continual increases in the density of transistors that are printed on integrated circuits. This project aims to develop an integrated top down/bottom up process, using traditional photolithography and self assembly of novel block copolymers, for significantly reducing pattern defectivity for current and future generations of integrated circuit manufacture. Ultimately this will lead to faster, more energy-efficient processors. Through the course of the project a detailed fundamental understanding of the thermodynamic properties of the range novel block copolymers will also be developed, which will also be significant in technological areas such as high density data storage devices.'',

Experts

Professor Andrew Whittaker

Affiliate of Australian Research Council Centre of Excellence for Green Electrochemical Transformati
ARC COE for Green Electrochemical Transformation of Carbon Dioxide
Faculty of Engineering, Architecture and Information Technology
Affiliate Professor
School of Chemistry and Molecular Biosciences
Faculty of Science
Professorial Research Fellow and Senior Group Leader
Australian Institute for Bioengineering and Nanotechnology
Andrew Whittaker
Andrew Whittaker

Associate Professor Idriss Blakey

Principal Research Fellow - CAI
Australian Institute for Bioengineering and Nanotechnology
Idriss Blakey
Idriss Blakey