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Next Generation High Sensitivity Polymeric EUV Resists (2012-2015)

Abstract

Photolithography is the basis of the multi-billion dollar integrated circuit industry. The continued success of the industry is due to the ability to project ever smaller images, and this is critically dependent on a thin layer of polymer, the polymer resist. The industry however has reached a critical juncture, where the size of the features being projected has become comparable to the size of defects inherent in the projection process. Therefore the continued success of the industry depends on new technologies to allow low-defect printing at 10-20 nm. In this project we will develop new classes of highly sensitive polymers with high fidelity of patterning for the next generation of resists.

Experts

Professor Andrew Whittaker

Affiliate of Australian Research Council Centre of Excellence for Green Electrochemical Transformati
ARC COE for Green Electrochemical Transformation of Carbon Dioxide
Faculty of Engineering, Architecture and Information Technology
Affiliate Professor
School of Chemistry and Molecular Biosciences
Faculty of Science
Professorial Research Fellow and Senior Group Leader
Australian Institute for Bioengineering and Nanotechnology
Andrew Whittaker
Andrew Whittaker

Associate Professor Idriss Blakey

Principal Research Fellow - CAI
Australian Institute for Bioengineering and Nanotechnology
Idriss Blakey
Idriss Blakey